PROBE MARK INSPECTION APPARATUS, PROBE APPARATUS, PROBE MARK INSPECTION METHOD AND STORAGE MEDIUM

摘要

PURPOSE: A probe mark inspection apparatus, probe apparatus, probe mark inspection method and storage medium are provided to rapidly grasp error of the probe needle or the overdrive etc. CONSTITUTION: The chip(1) is formed on wafer. The probe needle is contacted to the electrode pad(2) of chip and the electrical measurement operates. The formed probe mark is image-picked up on the electrode pad. Existence and nonexistence of the exposure of the base layer of the electrode pad are tested. Image data of the color component selected according to the difference of the reflectivity of the material of the material of the electrode pad and base layer is obtained. The exposure state of the base layer of the electrode pad is detected.