Process for producing silicon wafers,申请号EP20060016964-传众专利搜索

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发明名称	Process for producing silicon wafers
摘要
申请公布号	EP1755156(B1)	申请公布日期	2009.12.02
申请号	EP20060016964	申请日期	2006.08.14
申请人	SUMCO CORPORATION	发明人	KOYATA, SAKAE;HASHII, TOMOHIRO;MURAYAMA, KATSUHIKO;TAKAISHI, KAZUSHIGE;KATOH, TAKEO
分类号	H01L21/306;H01L21/302	主分类号	H01L21/306
代理机构		代理人
主权项
地址

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