发明名称 |
Pixel circuit substrate, LCD apparatus and projection display apparatus having interlayer insulating film comprising a laminate of inorganic insulating material having a uniformly flat surface over TFT |
摘要 |
A pixel circuit substrate includes a first interlayer insulating film which is made of an inorganic material at least in a source and drain regions of a thin film transistor. A contact hole is formed in an area above the source and drain regions of a thin film transistor in the first interlayer insulating film. A wiring layer is formed on the first interlayer insulating film, extends to an inner wall and a bottom surface of the contact hole. On a top surface of the wiring layer is formed a recess reflecting the shape of a contact hole. A second interlayer insulating film is formed on the wiring layer, embedded in the recess and has a flat top surface in an area above the thin film transistor. A storage capacitor on the second interlayer insulating film is disposed in the area above the thin film transistor.
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申请公布号 |
US7626648(B2) |
申请公布日期 |
2009.12.01 |
申请号 |
US20050242935 |
申请日期 |
2005.10.05 |
申请人 |
NEC CORPORATION |
发明人 |
SHIOTA KUNIHIRO;TANABE HIROSHI |
分类号 |
G02F1/136 |
主分类号 |
G02F1/136 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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