发明名称 Process for the collective fabrication of optical filtering components, and wafer of components
摘要 The invention relates to tunable wavelength-selective optical filters for letting light of a narrow optical spectrum band, centered around an adjustable wavelength, to pass through and to stop wavelengths lying outside this band. More particularly, the invention relates to a process for the collective fabrication of optical filtering components, consisting in producing a plurality of optical filtering components on a transparent substrate. The process further comprises covering the plurality of components with a transparent collective cover, in optically testing each component individually, and in separating the various components from one another. The invention also relates to a wafer of components, comprising a transparent substrate on which a plurality of optical filtering components has been produced, a transparent cover (8) collectively covering the components. The wafer further includes means for individually testing each component.
申请公布号 US7626239(B2) 申请公布日期 2009.12.01
申请号 US20040514111 申请日期 2004.11.12
申请人 ATMEL GRENOBLE S.A. 发明人 MOY JEAN-PIERRE;HUGON XAVIER
分类号 H01L33/00;G01N21/00;G02B6/34;H01L31/0216 主分类号 H01L33/00
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