| 摘要 |
PURPOSE: A method for forming a scribe lane is provided to increase the number of a net-die by forming a scribe lane between chips by more than two different widths. CONSTITUTION: In a method for forming a scribe lane, a scribe lane(110) is formed between a chips(100) on a wafer. At least more than two kinds of different widths are formed according the arrangement of an align key(121) and an overlay key(123). The number of a net-die is increased by minimizing the total area of the scribe lane, and the align key and the overlay key are arranged is formed on some region of a scribe lane of which width is 90 ~ 100um and the other region is 60~70um. The scribe lane in which the align key and overlay key are arranged is formed in an X and Y direction.
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