System and method for varying the starting conditions for a resolution enhancement program to improve the probability that design goals will be met

摘要

A method for improving a resolution enhanced (RE) layout produced by an RE program that starts with a nominal integrated circuit layout. For at least one feature of said layout at least one critical feature quality is chosen from a set of feature qualities and at least one starting condition of said resolution enhancement program is adjusted in response to said at least one critical feature quality.