发明名称 METHOD OF TESTING AN OBJECT AND TEST HANDLER
摘要 PURPOSE: A method for testing an object and a test handler are provided to reduce a process time for testing an object by securing a sufficient preheating time of the object. CONSTITUTION: A tray including objects is loaded in a loading part(S10). The objects are loaded to a hot plate from the tray arranged to the loading part(S20). The hot plate including the objects is moved from a first position to a second position(S30). The objects are delivered from the hot plate to a loading shuttle(S40). The objects loaded in the loading shuttle are transferred to a test part(S50). The tested objects are loaded in an unloading shuttle(S60). The objects loaded in the unloading shuttle are loaded in an unloading buffer(S70). The objects are loaded from the unloading buffer to the tray(S80).
申请公布号 KR20090122662(A) 申请公布日期 2009.12.01
申请号 KR20080048592 申请日期 2008.05.26
申请人 SECRON CO., LTD. 发明人 KWON, SE MIN;KIM, YANG HEE
分类号 G01R31/26;H01L21/66 主分类号 G01R31/26
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