APPARATUS FOR TREATING SURFACE GENERATING PLASMA USING ELECTRODE COATED WITH NANOPOROUS DIELECTRIC

摘要

PURPOSE: A surface treatment apparatus for generating plasma using electrodes coated with nanoporous dielectric is provided to generate plasma using the air in atmosphere with low power in a room temperature and high pressure. CONSTITUTION: A surface treatment apparatus(100) includes a first electrode(110), a second electrode(130), and a power supply device(150). The first electrode and the second electrode have a cylindrical rod shape, and are arranged at a predetermined interval. The power supply device is connected with the first electrode and the second electrode. The uniform glow discharge happens between the first electrode and the second electrode. A process material(180) passes between the first electrode and the second electrode.