Saw device for sawing silicon blocks, has cutting element for sawing silicon block, which is propelled by driving device, and guiding device that aligns cutting element

摘要

The saw device (1) has a cutting element for sawing silicon block, which is propelled by a driving device. A guiding device (6) is provided, where a cutting element is aligned by the guiding device along a provided web. A monitoring device (7) is provided for monitoring the position of the cutting element. An independent claim is included for a method for sawing silicon blocks.