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发明名称
Method of determination of temperature gradient and temperature in semiconductor instruments
摘要
申请公布号
PL203921(B1)
申请公布日期
2009.11.30
申请号
PL20020356876
申请日期
2002.10.28
申请人
INSTYTUT TECHNOLOGII ELEKTRONOWEJ
发明人
PIOTROWSKI TADEUSZ;SIKORSKI STANIS&LSTROK,AW
分类号
H01L21/00;G01K7/00;G01R31/00;H01L21/66
主分类号
H01L21/00
代理机构
代理人
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