发明名称 SLIT TYPE SUPERSONIC NOZZLE AND SURFACE-CLEANING APPARATUS HAVING THE SAME
摘要 PURPOSE: A slit type supersonic nozzle and a surface-cleaning apparatus having the same are provided to remove micro-pollution rapidly by transferring a target in a vertical direction to the length of a slit. CONSTITUTION: In a slit type supersonic nozzle and a surface-cleaning apparatus having the same, a nozzle body(111) is extended along the width direction of a target. A pressure division unit is installed inside the nozzle body and includes a flow channel along the length direction of the target. A slit(113) sprays a hypersonic gas jet on the target, and gas inlets are separated from each other in the length direction of the nozzle body. A pressure division channel is installed on a first and a second side wall, and the slit includes a slope contraction part and curved surface connection part.
申请公布号 KR100928691(B1) 申请公布日期 2009.11.27
申请号 KR20090024958 申请日期 2009.03.24
申请人 GD MACHINES CO., LTD. 发明人 KIM, SANG HYEON
分类号 H01L21/302;H01L21/304 主分类号 H01L21/302
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