SURFACE PROFILE MEASURING DEVICE AND EXPOSURE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a surface profile measuring device for highly accurately measuring the surface profile of an object to be measured in a simple configuration, and to provide an exposure device.

SOLUTION: The surface profile measuring device makes white color light from a light source incident on a substrate and a reference face at an incident angle of 80 degrees or more by using a prism having a moth eye shaped reflection prevention part to obtain white color interference light. The device decomposes the white color interference light into interference light due to a plurality of single lights by using an optical filter enabling wavelength selection. The device performs fast Fourier transform for a plurality of the interference lights to obtain power spectrum distribution and uses peak position information of spectra to measure the surface profile of the substrate.

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