摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor which includes both of high mobility and stability to environment, and also includes light-detecting sensitivity to a light in a visible region, and to provide a semiconductor device therefor. <P>SOLUTION: The semiconductor of an oxynitride is formed from an oxynitride of a metal. The oxynitride includes Zn and at least one element selected from In, Ga, Sn, Mg, Si, Ge, Y, Ti, Mo, W and Al, wherein an atomic composition ratio of N in the oxynitride, which is expressed by N/(N+O), is 7 atom% to 80 atom%. <P>COPYRIGHT: (C)2010,JPO&INPIT |