摘要 |
PROBLEM TO BE SOLVED: To aim at improvement of dielectric strength of a vacuum valve through restraint of secondary electron emission from a creepage surface of a vacuum insulation vessel. SOLUTION: The vacuum valve is provided with a vacuum insulation vessel 1 made of ceramics with a rugged part 10 fitted on an inner face, a fixed side sealing metal fitting 2 sealed at one-end opening of the vacuum insulation vessel 1, a fixed side conductive shaft 4 fixed in penetration to the fixed side sealing metal fitting 2, a fixed side contact 5 firmly fixed to an end of the fixed side conductive shaft 4, a movable side sealing metal fitting 3 sealed to another end opening of the vacuum insulation vessel 1, a movable side conductive shaft 7 penetrating the movable side sealing metal fitting 3 in free movement, a movable side contact 6 firmly fixed to the end of the movable side conductive shaft 7 and getting in and out of contact with the fixed side contact 5, and bellows 8 free in contraction and expansion with one end sealed to a middle part of the movable side conductive shaft 7 and with the other end sealed to the movable side sealing metal fitting 3. COPYRIGHT: (C)2010,JPO&INPIT
|