发明名称 |
MICROREACTOR FOR SOLUTION DEPOSITION AND METHOD OF USE |
摘要 |
A novel microreactor producing customized deposition products and a method for optimizing the deposition process. The microreactor has a unique design with high surface-to-volume ratio that produces high deposition yield with a minimal amount of waste. The invention may be particularly applicable to the field of optoelectronics and photovoltaics.
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申请公布号 |
US2009291557(A1) |
申请公布日期 |
2009.11.26 |
申请号 |
US20090469645 |
申请日期 |
2009.05.20 |
申请人 |
DREXEL UNIVERSITY |
发明人 |
MCPEAK KEVIN;BAXTER JASON B. |
分类号 |
H01L21/285;C23C16/50;C23C16/52 |
主分类号 |
H01L21/285 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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