发明名称 MICROREACTOR FOR SOLUTION DEPOSITION AND METHOD OF USE
摘要 A novel microreactor producing customized deposition products and a method for optimizing the deposition process. The microreactor has a unique design with high surface-to-volume ratio that produces high deposition yield with a minimal amount of waste. The invention may be particularly applicable to the field of optoelectronics and photovoltaics.
申请公布号 US2009291557(A1) 申请公布日期 2009.11.26
申请号 US20090469645 申请日期 2009.05.20
申请人 DREXEL UNIVERSITY 发明人 MCPEAK KEVIN;BAXTER JASON B.
分类号 H01L21/285;C23C16/50;C23C16/52 主分类号 H01L21/285
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