| 摘要 |
A substrate processing system capable of making it easy to set an operation authority in a plurality of substrate processing apparatuses and a management device is provided. In a substrate processing system including a plurality of substrate processing apparatuses for executing a process on a wafer, a management device connected to the plurality of substrate processing apparatuses via a communication line, the management device has a display screen for setting an operation authority to each of the management device and the plurality of substrate processing apparatuses capable of communicating with the management device for each user.
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