OPTICAL INTERCONNECTION STRUCTURE AND METHOD FOR MANUFACTURING THE SAME

摘要

The present invention relates to an optical interconnection structure and a method for manufacturing the same. The optical interconnection structure includes a silicon substrate on which at least one groove formed with a lens is formed to have a curvature radius on the upper surface thereof; and a silica layer that is formed on the silicon substrate including the groove formed with the lens to retain a shape of the groove formed with the lens. As a result, there are effects that the optical interconnection structure can be manufactured in great quantities by performing most of the processes using a semiconductor processing equipment and have better thermal characteristics than that of the existing PCB substrate.