| 摘要 |
The present invention relates to an optical component for a maskless exposure apparatus, and more particularly, to a micro-prism array or a micro-mirror array which is an optical component capable of screening diffused light such that the image of the pixel of a digital micro-mirror display device formed by a first image forming lens in the maskless exposure apparatus gives no influences to the image of the neighboring pixel, and of totally reflecting the light after reflection or diffraction at the same time, thus improving exposure performance by using the quantity of light being transmitted without a loss and increasing numerical apertures at the same time. The optical component is configured such that a micro-prism array with a plurality of micro-prisms or a micro-mirror array with a plurality of micro-mirrors is arranged in place of a micro-lens array of an exposure apparatus such that a light incidence portion is formed in a wide manner and a light exit portion is formed in a narrow manner, and light being transmitted is focused to increase the quantity of light. |
