POLYMER MEMS HAVING MORE CONTROLLED RELATIONSHIP BETWEEN DEFORMATION AND ACTUATION VOLTAGE

摘要

A MEM device has a rigid body (30, 40, 60, 170, 250) and an actuator in the form of a flexible film (15, 50), able to move between a rolled up state away from the rigid body and a rolled out state against the rigid body, by a controllable driving force which causes an attraction of rolled up parts of the flexible film to the rigid body. The rigid body or the flexible film are patterned so that a given level of driving provides an attraction which differs at different parts of the pattern. By patterning to enable non uniform attraction at different parts, a range of attractions which could cause release of a given part of the film can be made narrower and thus more predictable. Thus the drive force needed to achieve initial separation can be controlled, or the roll up can be held stably at an intermediate point.