| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing an oscillator in sufficient yield by preventing a damage of a crystal chip during etching by exactly finishing contours of a plurality of oscillation legs projected from a base part without etching residue by a process of a crystal oscillator in which electrodes are provided by forming the oscillation legs with thin groove parts by the etching. <P>SOLUTION: The method for manufacturing the crystal oscillator includes a first crystal etching process and a second crystal etching process, a planar crystal substrate 1000 is etched in the first crystal etching process to form the complete contours of the oscillation legs 1100, or the shape including a number of additional parts for connecting the oscillation legs to surrounding frames of the crystal substrate, and the shape by connecting the base part 3200 with a connection frame 1400, when there is the additional part in the oscillation legs, it is removed in the second crystal etching process, and the contours of the base part and the groove parts 3300 are simultaneously formed. Since the contours of the oscillation legs are exactly finished over sufficient time in the first crystal etching process, the base part is connected with the connection frame and firm, the crystal chip does not break at the thin connection part 1600 during processing. <P>COPYRIGHT: (C)2010,JPO&INPIT |
