发明名称 LIGHT BEAM SCANNING APPARATUS, LASER MACHINING APPARATUS, TEST METHOD AND LASER MACHINING METHOD
摘要 An apparatus for scanning a light beam, the apparatus comprises a mirror configured to reflect an incident light beam, a motor configured to rotate the mirror so change a direction along which the light beam reflected by the mirror travels, a detector configured to detect tilt of a detected region of the mirror with respect to a rotation angle of the mirror, and a processor configured to calculate an amount of tilt of the mirror with respect a direction along a rotation axis of the motor, based on the rotation angle of the mirror and the tilt of the detected region detected by the detector.
申请公布号 US2009289042(A1) 申请公布日期 2009.11.26
申请号 US20090437143 申请日期 2009.05.07
申请人 CANON KABUSHIKI KAISHA 发明人 UEDA SHINJI
分类号 B23K26/00;G01B9/02;G01B11/26 主分类号 B23K26/00
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