| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus which can highly precisely comprehend a relative coordinates positional relation between a laser beam emitting part (machining point) and a camera for alignment. <P>SOLUTION: The laser beam machining apparatus includes a laser beam emitting means 2 machining a workpiece W held to a chuck table 1. The apparatus further includes: a first camera C1 imaging an alignment mark A arranged at the workpiece W on the chuck table 1; and a positioning means 4 relatively moving the chuck table 1 and the laser beam emitting means 2 to the X-axis direction and the Y-axis direction. The apparatus further includes: a second cameral C2 detecting a machining point B on which a laser beam P is emitted; and a memory part 52 memorizing the relative coordinates positional relation between the machining point B and the first camera C1 in a design stage. Whether a difference is present or not between the relative coordinates positional relation in the design stage and the actual relative coordinates positional relation between the machining point B and the first cameral C1 is determined (determination part 51), and, in the case there is a difference, machining based on the actual relative coordinates positional relation is performed. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
