| 摘要 |
PROBLEM TO BE SOLVED: To inspect only a pattern of an optically-transparent substrate in a pattern inspection using transmissive illumination. SOLUTION: An inspection optical system inspects, by imaging light transmitted through the optically-transparent substrate, in which an imaging device 20, a lens system 18, a transmissive illumination light source 17, and an oblique illumination light source 19 are respectively disposed across the an inspected substrate 16, the transmissive illumination light source 17 is disposed to irradiate the inspected substrate 16 with a light at substantially a perpendicular angle; and the oblique illumination light source 19 is disposed to irradiate the inspected substrate 16 with light from an oblique direction. A pattern 15 of the surface of the inspected substrate 16 can be distinguished from flaws 22, at the back surface in an image by this construction, and only the pattern 15 can be inspected. COPYRIGHT: (C)2010,JPO&INPIT |
