发明名称 Inspection apparatus and method for semiconductor IC
摘要 The connection between a PTC element 22a corresponding to each semiconductor IC 11a and a power-supply line 25a is performed via a relay, a high voltage is supplied to the power-supply line 25a by sequentially turning on the relays, and a high voltage is supplied to each PTC element 22a in order, whereby it is possible to trip beforehand a PTC element 22a connected to a DC-defective semiconductor IC 11a. In this state, wafer level burn-in is performed together, which enables the PTC element 22a to be positively tripped during the burn-in for the DC defect of the semiconductor IC 11a, with the result that it is possible to increase the reliability of the burn-in.
申请公布号 US2009289653(A1) 申请公布日期 2009.11.26
申请号 US20090461194 申请日期 2009.08.04
申请人 PANASONIC CORPORATION 发明人 MIYAKE NAOMI;NAKATA YOSHIRO
分类号 G01R31/26 主分类号 G01R31/26
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