| 摘要 |
PROBLEM TO BE SOLVED: To prevent control performance from deteriorating when a plurality of channels having different properties are associated. SOLUTION: A step response waveform of each of a plurality of channels is measured (step n1), a maximum value of maximum gradients R of the respective channels is extracted (step n2), it is decided whether or not the plurality of channels can be grouped by the maximum gradients R based on 1/2 of the maximum value as a threshold value (step n3). When they can be grouped, it is decided that the channel having the different property exists among the plurality of channels, an average temperature of detection temperatures of the channels of a group having small maximum gradients R is converted into a representative temperature (steps n4, 5), and gradient temperature control is performed. COPYRIGHT: (C)2010,JPO&INPIT
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