| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To obtain a method for roughening a substrate capable of uniform roughening of the surface of a substrate independent of the material of the substrate, a method for manufacturing a photovoltaic device, and the photovoltaic device. <P>SOLUTION: A method for roughening a substrate and manufacturing a photovoltaic device includes: a first process to form a mask film on the surface of one face side of the substrate; a second process to transcribe concave and convex shapes of a mold onto the mask film by pressing using the mold having concave and convex shapes on the surface; a third process to remove the mask film from the direction almost perpendicular to the in-plane direction of the substrate by dry etching; and a fourth process to perform dry etching to the surface of the substrate from the direction almost perpendicular to the in-plane direction of the substrate, after the removal of the mask film. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
