| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain an inspecting method of the shape of a reflective curved surface which makes it possible to decides, easily and in a short time, whether the shape of the reflective curved surface to be inspected provided on an optical path of a prescribed optical system is appropriate or not. Ž<P>SOLUTION: An aspheric mirror 50 is provided in a projection optical system 40 for inspection and an original image for inspection is displayed on a transmission type liquid crystal panel 30. A similar enlarged image of the original image for inspection is projected onto a screen 60 for inspection and image data thereof are obtained by an imaging camera 71. The obtained image data are subjected to Fourier transform and a graph of a spectral function in a spatial frequency range is determined. In this graph of the spectral function, a peak part corresponding to a prescribed spatial frequency which the original image for inspection has is specified, and based on the height and the half-value width of the peak part, it is decided whether the shape of the aspheric mirror 50 is appropriate or not. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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