| 摘要 |
PROBLEM TO BE SOLVED: To provide a small high-performance probe, and its manufacturing method. SOLUTION: This probe 22 is provided in a probe card 20 for inspecting an inspection object electrically, and includes a connection section 34 connected to a wiring board 21 of the probe card 20, a contact section 31 for coming into contact with an electrode pad of the object, a beam section 32 extending towards the contact section 31 from the connection section 34, and a hinge section 33 for supporting the beam section 32 rotatably with respect to the connection section 34. COPYRIGHT: (C)2010,JPO&INPIT
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