METHOD FOR PRODUCING CERIUM SALT, CERIUM OXIDE, AND CERIUM-BASED ABRASIVE MATERIAL

摘要

PROBLEM TO BE SOLVED: To reduce scratch developed on a surface to be polished in polishing with a cerium-based abrasive material containing cerium oxide particles, by reducing the amount of impurities contained in cerium salt particles to heighten the purity, in a method for producing a cerium salt which is a raw material for cerium oxide particles. SOLUTION: The method for producing the cerium salt includes: obtaining one or more cerium-containing intermediates from a cerium compound; and adding a precipitant to obtain a cerium salt precipitate, wherein at least one step of separating and removing insoluble components from the cerium-containing intermediates in the solution state is included. COPYRIGHT: (C)2010,JPO&INPIT