发明名称 SEMICONDUCTOR MEMORY DEVICE AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor memory device which reduces leakage current and contains a static type memory cell, and also to provide its manufacturing method. SOLUTION: A semiconductor memory device comprises: a plurality of memory cells; a plurality of bit lines; a plurality of word lines; and a controlling n-type transistor Tr1. The controlling n-type transistor Tr1 controls voltage potentials of the plurality of word lines or the plurality of bit lines. The plurality of memory cells have a memory cell n-type transistor Tr2 for maintaining data. The density of an n-type impurity in a gate electrode GE2 of the memory cell n-type transistor Tr2 is lower than that of an n-type impurity in a gate electrode GE1 of the controlling n-type transistor Tr1. Because a threshold voltage Vth of the memory cell n-type transistor (Transistor Tr2) is thereby raised high, a leak current of the semiconductor memory device is lowered. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009277717(A) 申请公布日期 2009.11.26
申请号 JP20080125019 申请日期 2008.05.12
申请人 RENESAS TECHNOLOGY CORP 发明人 KAMOTO SHUICHI;MITSUHIRA NORIYUKI
分类号 H01L21/8244;G11C11/41;H01L27/11 主分类号 H01L21/8244
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