| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a microlens array including microlenses of asymmetric shape by using a distributed density mask. SOLUTION: The distributed density mask is constituted so that a light-shielding pattern is set on grid points, for forming the microlens array in which a plurality of unit lenses are arrayed, wherein gradation boundary circles are concentrically formed from the center of each unit lens of the density distribution mask, the gradation boundary circles having the same size are formed into an integrated assembly, and such shrinkage processing as to enlarge and shrink the center coordinates of the respective gradation boundary circles with different magnifications each assembly with respect to the center of the microlens array is performed and, thereby, the distributed density mask in which the light-shielding patterns having sizes in accordance with gradations are disposed on grid points each annular regions of the unit lenses divided by the gradation boundary circles is manufactured. Further, the microlens array is manufactured by using the distributed density mask. COPYRIGHT: (C)2010,JPO&INPIT |
