| 摘要 |
PROBLEM TO BE SOLVED: To achieve a probe position correcting method which enables more practically suitable correction of positional relation and allows operators to correct positional relation easily. SOLUTION: The probe position correcting method, in which a wafer 100 having multiple electrode pads P and Q formed thereon is shifted relative to multiple probes 11 of a probe card 12 in three axial directions (X, Y and Z) so as to correct positions at which the multiple electrode pads and the multiple probes make contact with each other includes: a step (201) of bringing the multiple electrode pads and the multiple probes into contact with each other; a step (203) of recognizing probe traces by processing their images; a step (204) of computing margins between the probe traces and frames of the multiple electrode pads in four directions (±X directions and±Y directions); a step (205) of computing the minimum margin in each of the four directions; and a step of correcting positions at which the multiple electrode pads and the multiple probes make contact with each other on the basis of the minimum margins in the four directions. COPYRIGHT: (C)2010,JPO&INPIT
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