| 摘要 |
PROBLEM TO BE SOLVED: To provide an object with an irregular surface capable of controlling a secondary-emission coefficient to a desired value and its forming method, and to provide a display device capable of stably obtaining good characteristics and its manufacturing method. SOLUTION: In figure (a), an electrode 2, a dielectric layer 3, a dielectric protection layer 4 containing fluorine are formed on a face board 1. In figure (b), a resist mask is formed. As shown in figure (c), the dielectric protection layer 4 other than a masked part is etched by dry etching. By removing the mask 5, the surface with minute irregularity can be obtained, the secondary emission coefficient of the dielectric protection layer 4 can be controlled to a desired value, and good characteristics are stably ensured. COPYRIGHT: (C)2005,JPO&NCIPI
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