ONE-DIMENSIONAL ARRAYS OF BLOCK COPOLYMER CYLINDERS AND APPLICATIONS THEREOF
摘要
Methods for fabricating sublithographic, nanoscalc microstructures in one-dimensional arrays utilizing self-assembling block copolymers, and films and devices formed from these methods are provided.
申请公布号
WO2009102551(A3)
申请公布日期
2009.11.26
申请号
WO2009US32130
申请日期
2009.01.27
申请人
MICRON TECHNOLOGY, INC.;MILLWARD, DAN, B.;STUEN, KARL
