| 摘要 |
<P>PROBLEM TO BE SOLVED: To easily perform predetermined processings on an exposure device. <P>SOLUTION: The exposure device has a mask stage device ST for holding a mask and a lighting device IL2 for lighting up a mask. Furthermore, the exposure device includes an elevation device LT for integrally elevating and lowering the mask stage device and lighting device. <P>COPYRIGHT: (C)2010,JPO&INPIT |
