| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain an image photographed with appropriate illumination by securely adjusting the optical axis. Ž<P>SOLUTION: In adjusting the optical axis of an objective lens 13, a luminance contour line is created from a real-time image obtained by the illumination of an external light source, and the image is displayed in a monitor 55. The position of the objective lens 13 is adjusted along X' and Y' axes so that the position of the largest luminance of the luminance contour line matches the center of the screen and that the luminance contour line is a symmetrical distribution curve relative to the center of the screen. Meanwhile, in adjusting the optical axis of a condenser lens 26, a white chart is photographed, and the luminance contour line is displayed in the monitor 55 from the real-time image. The position of the objective lens 26 is adjusted in the direction of the X and Y axes and around the X and Y axes. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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