| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ion source having electric field strength required for generating high-brightness ion beams while preventing discharge between an electric field ionizing electrode and an external electrode. Ž<P>SOLUTION: The ion source includes the electric field ionizing electrode 10 having an acuate front end 16, a container 20 storing it, and the external electrode 30. The container 20 has a front end 24 encircling a micro opening 26, and the electric field ionizing electrode 10 is arranged at a position where the front end 16 of the electric field ionizing electrode 10 is protruded from the micro opening 26 to the outside of the container 20. The external electrode 30 is arranged at a position where the front end 24 of the container 20 is laid between the external electrode 30 and the front end 16 of the electric field ionizing electrode 10 to interrupt a discharge passage between both electrodes. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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