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发明名称
Verfahren zur Herstellung einer integrierten Schaltung mit Seitenwandabstandshaltern mit geringer Verspannung
摘要
申请公布号
DE112004002638(B4)
申请公布日期
2009.11.26
申请号
DE200411002638T
申请日期
2004.12.21
申请人
ADVANCED MICRO DEVICES INC.
发明人
NGO, MINH-VAN;CHAN, SIMON S.;BESSER, PAUL R.;KING, PAUL L.;RYAN, ERROL TODD;CHIU, ROBERT J.
分类号
H01L21/336;H01L21/8234
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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