| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and apparatus for inspecting characteristic of a magnetic field generating element, which can inspect recording characteristic of a thin-film magnetic head element prior to final inspection of a HGA. Ž<P>SOLUTION: A sensor unit 17 can move slightly in X, Y and Z directions by a support by a slightly moving unit 15. The slightly moving unit 15 is made to move in the X and Y directions by a predetermined amount, and a magnetic field generated by the thin-film magnetic head element 21 at that position is read by the sensor unit 17, and a voltage outputted from the sensor unit 17 as the read result is recorded. An inspecting unit 19 evaluates the recording characteristic of the thin-film magnetic head element 21 based on the recorded data which is obtained by repeating the process a predetermined number of times. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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