| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a probe having a tip shape which exfoliates an oxide film on the surface of an electrode of an inspection object sufficiently, and makes it hard for pieces of the exfoliated oxide film to adhere. Ž<P>SOLUTION: The probe is composed of a joining part to be joined to an electrode of a probe card, an arm part extending from the joining part, and a tip part which is provided at a tip of the arm part and touches an electrode of the inspection object, and the tip part moves while touching the inspection object due to elastic deformation generated in the arm part, when the tip part touches the inspection object. The tip part has a shape bending by a predetermined angle in a direction in which the tip part moves with respect to the arm part while touching the inspection object. A contact surface which comes in contact with the inspection object of the tip part has an inclination of 1.5 to 30 degrees, favorably an inclination of 1.5 to 10 degrees, from the surface of the inspection object to the moving direction. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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