发明名称 THIN-FILM TRANSISTOR AND METHOD FOR MANUFACTURING THEREOF
摘要 PROBLEM TO BE SOLVED: To reduce variations in electric characteristics by decreasing an off current of a thin-film transistor and by increasing an on current. SOLUTION: In a semiconductor layer for forming the channel formation region of the thin-film transistor, a first semiconductor layer including a plurality of crystal regions is disposed at the side of a gate insulating layer, a second semiconductor layer having an amorphous structure is disposed at the side of source and drain regions, and an insulating layer, which includes a thickness for preventing flow of a carrier from being interrupted, is disposed between the first and second semiconductor layers. The first semiconductor layer is provided on a surface abutting on the gate insulating layer. The second semiconductor layer is provided at a side opposite to the surface, where the first semiconductor layer abuts on the gate insulating layer. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009278075(A) 申请公布日期 2009.11.26
申请号 JP20090097672 申请日期 2009.04.14
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 YAMAZAKI SHUNPEI;EGI YUJI;SASAGAWA SHINYA;KURATA MOTOMU
分类号 H01L29/786 主分类号 H01L29/786
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