LATERAL SEMICONDUCTOR DEVICE, AND METHOD FOR FABRICATING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide fabrication steps which provide a low gate-to-drain capacitance (CGD) and are compatible with standard CMOS flow. SOLUTION: An orthogonal gate extended drain MOSFET (EDMOS) structure provides a low gate-to-drain capacitance (CGD) and exhibits increased reliability. It has a gate electrode that is folded into the shallow trench isolation (STI) oxide region. Horizontal and vertical gate electrode segments provide gate control. It accommodates both high voltage devices and standard CMOS components on the same substrate. Reduced surface field (RESURF) technology is employed to optimize tradeoffs between high breakdown voltage and specific on-resistance. Device fabrication steps are compatible with standard CMOS flow and process modules can be added or removed from baseline CMOS technology. COPYRIGHT: (C)2010,JPO&INPIT