SINGLE CRYSTAL MANUFACTURING APPARATUS

摘要

Disclosed is a single crystal manufacturing apparatus (10) for manufacturing a single crystal according to the Czochralski method, comprising a main chamber (11) that houses a hot-zone component including a crucible (13), and a pull chamber (12) for removing and receiving a single crystal (6) pulled up from a raw material melt. The single crystal manufacturing apparatus (10) further comprises a multi-purpose chamber (2) substitutable with the pull chamber. Each of a heating means (L) for heating the raw material packed into the crucible and a cooling means (C) for cooling the hot-zone component after the single crystal has been pulled up can be installed in the multi-purpose chamber (2) of this single crystal manufacturing apparatus (10). As a result, the operability of a single crystal manufacturing apparatus for the manufacture of a single crystal of large aperture of, for example, approximately 200 mm or greater can be improved, and the single crystal productivity can be increased.