摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electron emitting element having stable electron emission characteristics with less fluctuations over a long period. <P>SOLUTION: The conductive film is divided in part into a plurality of parts by a plurality of apertures, and recessed portions 1a are formed on a substrate 1 of a region corresponding to the apertures; and by extending the distance between the adjoining conductive films 4a, 4b in the region divided partially, extending of the extended portions toward the adjoining conductive films 4q, 4b where carbon films 5a, 5b deposited in an activation process in the vicinity of the conductive films 4a, 4b adjoin each other are connected by themselves 5a, 5b is prevented. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |