| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress unstable pressure fluctuation during the exhaust operation of a cryopump, and to increase gas storage amount. Ž<P>SOLUTION: The cryopump 100 includes: a refrigerator 50 equipped with a first cooling stage 13, and a second cooling stage 14 cooled to be a lower temperature than the first cooling stage 13; a radiation shield 40 formed with an opening 43 on a side surface, inserting the refrigerator 50 into the opening 43 so as to dispose the first cooling stage 13 outside and the second cooling stage 14 inside, and thermally connected to the fist cooling stage 13; and a refrigerator cover 70 thermally connected to the second cooling stage 14, extending from the inside to the outside of the radiation shield 40 through the opening 43, and disposed spaced apart from the radiation shield 40 in the opening 43. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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