| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a magnetic recording medium, capable of increasing productivity by manufacturing a medium with the same in-line type apparatus to reduce contamination due to handling. SOLUTION: The method of manufacturing the magnetic recording medium has an attachment step, a reforming step, a removal step, a protective film formation step, and a detachment step in this order. In the attachment step, a non-magnetic substrate, where at least a recording magnetic layer and a mask layer for patterning the recording magnetic layer are laminated, is attached to a carrier. In the reforming step, reactive plasma processing or ion irradiation processing is performed to a place not covered with the mask layer in the recording magnetic layer to reform magnetic characteristics, thus forming a magnetic recording pattern comprising a remaining magnetic body. In the removal step, the mask layer is removed. In the protective film formation step, a protective film is formed on the recording magnetic layer. In the detachment step, the non-magnetic substrate is removed from the carrier. In this case, at least one of the reforming, removal, protective film formation steps is performed continuously in a plurality of chambers. COPYRIGHT: (C)2010,JPO&INPIT
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