| 摘要 |
<p>PURPOSE: A film type photodegradable transfer material is provided to prevent distortion of patterns in light exposure, to improve resolution and fine line adhesive power, and to implement target patterns. CONSTITUTION: A film type photodegradable transfer material comprises a support film, a photodegradable photoresist layer, and an anti-reflection layer formed on the face laminated on a substrate. The anti-reflection layer has 90 % or more of an absorption rate for the light with wavelength of 200-700 nm. The anti-reflection layer comprises the same composition as the photoresist layer, further black dye, black pigment or and a pigment mixture substantially expressing black color.</p> |
