Vorrichtung und Verfahren zum Ermitteln eines Kompensationssignals zum Kompensieren von Piezo-Einflüssen auf eine integrierte Halbleiterschaltung

摘要

The device has a temperature detecting mechanism detecting temperature of a semiconductor circuit substrate and a processing mechanism generating a corrected discrepancy signal based on the detected temperature. An evaluation mechanism (16) provides a compensation signal based on an intermediate compensation signal and the discrepancy signal, where the compensation signal is a measure for mechanical stress acting on the substrate. An independent claim is also included for a method of determining a compensation signal.