| 摘要 |
PURPOSE: A light beam scanning apparatus and a laser machining apparatus are provided to process an object with high accuracy by compensating titling of a mirror at an X-axis and an Y-axis with a rotation angle of a mirror at an X axis and an Y- axis. CONSTITUTION: A light beam scanning(GM1) includes a mirror(2), a motor(1), a detector(DT1), and a processor(50). The motor turns a mirror, and the mirror changes a progress direction of the beam. The detector detects a slope of a target area(6) of the mirror in relation to an rotation angle of the mirror, and a processor calculates the slope of the target detected by the detector. The processor produces a gradient of the mirror in relation to the rotation axis direction of the motor based on the rotation angle of a mirror. The processor outputs an error signal exceeding the gradient of the mirror. |
