| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a small particulate substance detection device having small measurement errors and being manufacturable at low cost. Ž<P>SOLUTION: The particulate substance detection device 100 includes a detection device body 1, which is long in one direction and with two or more of through-holes 2 formed at one terminal; and at least a pair of electrodes 11, 12 embedded in the wall, forming the through-hole 2 covered with a dielectric material, wherein the charged particulate substance in a fluid flowing into the through-hole or a particulate substance in the fluid flowing into the through-hole, charged by the discharge generated in the through-hole, by applying a voltage to the pair of the electrodes, can be absorbed on the wall surface of the through-hole 2 and the particulate substance, absorbed on the wall surface of the through-hole 2, can be detected, by measuring the change in the electrical characteristics of the wall-forming the through-hole 2. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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